
CAMPUS
- 44,000m2 with modular cleanrooms Current total cleanroom area: 4,300 m2 Potential cleanroom expansion capability: 1,600 m2
- Labs: 1,100 m2
- Process utilities including power, DI water, heating/cooling and bulk site-generated gasses
- Administrative building: 5,750 m2
CLEANROOM
- Class 1@ 0.1µ with Filter fan concept
- Bay – Chase concept
- Full sub-fab
EQUIPMENT
- High-end 150mm equipment set
- 2.4 – 0.35 micron capability
- ~80% convertible to 200mm
- Current capacity of up to ~100k mask layers/wk