CAMPUS

  • 44,000m2 with modular cleanrooms Current total cleanroom area: 4,300 m2 Potential cleanroom expansion capability: 1,600 m2
  • Labs: 1,100 m2
  • Process utilities including power, DI water, heating/cooling and bulk site-generated gasses
  • Administrative building: 5,750 m2

CLEANROOM

  • Class 1@ 0.1µ with Filter fan concept
  • Bay – Chase concept
  • Full sub-fab

EQUIPMENT

  • High-end 150mm equipment set
  • 2.4 – 0.35 micron capability
  • ~80% convertible to 200mm
  • Current capacity of up to ~100k mask layers/wk